Compared with traditional sensors, MEMS micro/nano smart sensors based on microelectronics and micromachining technology have the advantages of small size, light weight, high reliability, suitable for mass production, and easy integration. It is one of the major worldwide scientific and technological fields and has broad application prospects. Arraying and integrating MEMS micro/nano smart sensors on flexible and stretchable substrates is also an important approach to implement flexible electronics (flexible hybrid electronics).

一、The industrialization platform for creating micro/nano sensor chips based on nano sensing materials and advanced MEMS manufacturing technology

二、Suspended-film type silicon-based MEMS micro-hot plate

Single chip design (a), pictures (b) and SEM images (c), 4 inch mass production of micro-hot plate (d), technical parameters (e) of micro-hot plate and gas sensor samples (f) based on micro-hot plate of micro-silicon of micro-electromechanical system (MEMS)